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- 2004050720 contributor B9854714.
- 2004050720 contributor B9854715.
- 2004050720 created "2004.".
- 2004050720 date "2004".
- 2004050720 date "2004.".
- 2004050720 dateCopyrighted "2004.".
- 2004050720 description "Includes bibliographical references and index.".
- 2004050720 extent "x, 186 p. :".
- 2004050720 identifier "1402080204 (alk. paper)".
- 2004050720 identifier "1402080212 (e-book)".
- 2004050720 identifier 2004050720-d.html.
- 2004050720 issued "2004".
- 2004050720 issued "2004.".
- 2004050720 language "eng".
- 2004050720 publisher "Boston : Kluwer Academic Publishers,".
- 2004050720 subject "671.3/5 22".
- 2004050720 subject "Micromachining.".
- 2004050720 subject "TJ1191.5 .J64 2004".
- 2004050720 title "An introduction to surface-micromachining / by Robert W. Johnstone, M. Parameswaran.".
- 2004050720 type "text".