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- 2004102296 alternative "Advanced short-time thermal processing for Si-based CMOS devices 2".
- 2004102296 alternative "Advanced short-time thermal processing for Si-based CMOS devices two".
- 2004102296 contributor B9874724.
- 2004102296 contributor B9874725.
- 2004102296 created "c2004.".
- 2004102296 date "2004".
- 2004102296 date "c2004.".
- 2004102296 dateCopyrighted "c2004.".
- 2004102296 description "Includes bibliographical references and indexes.".
- 2004102296 extent "xii, 428 p. :".
- 2004102296 identifier "1566774063".
- 2004102296 identifier 2004102296.html.
- 2004102296 isPartOf "Proceedings (Electrochemical Society) ; v. 2004-01.".
- 2004102296 isPartOf "Proceedings ; v. PV 2004-01".
- 2004102296 issued "2004".
- 2004102296 issued "c2004.".
- 2004102296 language "eng".
- 2004102296 publisher "Pennington, NJ : Electrochemical Society,".
- 2004102296 subject "Rapid thermal processing.".
- 2004102296 subject "Semiconductors Heat treatment.".
- 2004102296 subject "TK7871.85 A3535 2004".
- 2004102296 title "Advanced short-time thermal processing for Si-based CMOS devices 2".
- 2004102296 title "Advanced short-time thermal processing for Si-based CMOS devices II : proceedings of the international symposium / editors, Mehmet C. Öztürk, F. Roozeboom ... [et al.].".
- 2004102296 title "Advanced short-time thermal processing for Si-based CMOS devices two".
- 2004102296 type "text".