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- 2004103587 contributor B9875771.
- 2004103587 created "c2004.".
- 2004103587 date "2004".
- 2004103587 date "c2004.".
- 2004103587 dateCopyrighted "c2004.".
- 2004103587 description "Includes bibliographical references.".
- 2004103587 extent "viii, 131 p. :".
- 2004103587 identifier "354021612X (hb)".
- 2004103587 identifier 2004103587-d.html.
- 2004103587 identifier 2004103587-t.html.
- 2004103587 issued "2004".
- 2004103587 issued "c2004.".
- 2004103587 language "eng".
- 2004103587 publisher "Berlin ; New York : Springer,".
- 2004103587 subject "620/.5 22".
- 2004103587 subject "Microelectromechanical systems Congresses.".
- 2004103587 subject "Microstructure Congresses.".
- 2004103587 subject "Nanostructured materials Congresses.".
- 2004103587 subject "TK7875 .F86 2004".
- 2004103587 title "Functional micro- and nanosystems : proceedings of the 4th caesarium, Bonn, June 16-18, 2003 / Karl-Heinz Hoffmann, editor.".
- 2004103587 type "text".