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- 2004109174 contributor B9880244.
- 2004109174 contributor B9880245.
- 2004109174 created "2004.".
- 2004109174 date "2004".
- 2004109174 date "2004.".
- 2004109174 dateCopyrighted "2004.".
- 2004109174 description "Includes bibliographical references and index.".
- 2004109174 extent "xxiv, 311 p.".
- 2004109174 identifier "354022369X (hbk.)".
- 2004109174 identifier 2004109174-d.html.
- 2004109174 identifier 2004109174-t.html.
- 2004109174 issued "2004".
- 2004109174 issued "2004.".
- 2004109174 language "eng".
- 2004109174 publisher "Berlin ; [London] : Springer,".
- 2004109174 subject "621.3815 22".
- 2004109174 subject "Integrated circuits Design and construction Simulation methods.".
- 2004109174 subject "Integrated circuits Design and construction.".
- 2004109174 subject "TK7874 .L86 2004".
- 2004109174 title "Integrated modeling of chemical mechanical planarization for sub-micron IC fabrication : from particle scale to feature, die and wafer scales / Jianfeng Luo, David Dornfeld.".
- 2004109174 type "text".