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- 2004114045 contributor B9884224.
- 2004114045 created "c2005.".
- 2004114045 date "2005".
- 2004114045 date "c2005.".
- 2004114045 dateCopyrighted "c2005.".
- 2004114045 description "Includes bibliographical references (p. [193]-217) and index.".
- 2004114045 extent "ix, 229 p. :".
- 2004114045 identifier "3540237828".
- 2004114045 identifier 2004114045-d.html.
- 2004114045 identifier 2004114045-t.html.
- 2004114045 isPartOf "Microtechnology and MEMS".
- 2004114045 issued "2005".
- 2004114045 issued "c2005.".
- 2004114045 language "eng".
- 2004114045 publisher "Berlin ; New York : Springer,".
- 2004114045 subject "621.39/732 22".
- 2004114045 subject "Metal oxide semiconductors, Complementary.".
- 2004114045 subject "Microelectromechanical systems.".
- 2004114045 subject "Sensorimotor integration.".
- 2004114045 subject "TK7875 .H54 2005".
- 2004114045 title "Integrated chemical microsensor systems in CMOS technology / A. Hierlemann.".
- 2004114045 type "text".