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- 2004267084 alternative "Metrology and inspection".
- 2004267084 contributor B9889847.
- 2004267084 contributor B9889848.
- 2004267084 created "c2003.".
- 2004267084 date "2003".
- 2004267084 date "c2003.".
- 2004267084 dateCopyrighted "c2003.".
- 2004267084 description "Includes bibliographical references and author index.".
- 2004267084 extent "ix, 210 p. :".
- 2004267084 identifier "0819450154".
- 2004267084 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 5145.".
- 2004267084 isPartOf "SPIE proceedings series ; v. 5145".
- 2004267084 issued "2003".
- 2004267084 issued "c2003.".
- 2004267084 language "eng".
- 2004267084 publisher "Bellingham, Wash. : SPIE,".
- 2004267084 subject "620/.0044 22".
- 2004267084 subject "Interferometry Congresses.".
- 2004267084 subject "Measurement Congresses.".
- 2004267084 subject "Microelectromechanical systems Congresses.".
- 2004267084 subject "Microelectronics Congresses.".
- 2004267084 subject "Optical detectors Industrial applications Congresses.".
- 2004267084 subject "Quality control Optical methods Congresses.".
- 2004267084 subject "TS156.2 .M53 2003".
- 2004267084 title "Metrology and inspection".
- 2004267084 title "Microsystems engineering : metrology and inspection III : 23-25 June, 2003, Munich, Germany / Christophe Gorecki, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cosponsored by, EOS--European Optical Society, WLT--Wissenschaftliche Gesellschaft Lasertechnik e.V. (Germany).".
- 2004267084 type "text".