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- 2004268394 alternative "Advances in photonic communications, sensing, metrology, packaging and assembly".
- 2004268394 alternative "MEMS, MOEMS".
- 2004268394 contributor B9890435.
- 2004268394 contributor B9890436.
- 2004268394 created "c2003.".
- 2004268394 date "2003".
- 2004268394 date "c2003.".
- 2004268394 dateCopyrighted "c2003.".
- 2004268394 description "Includes bibliographical references and author index.".
- 2004268394 extent "vii, 203 p. :".
- 2004268394 identifier "0819447404".
- 2004268394 isPartOf "Proceedings of SPIE, 0277-786X ; v. 4945".
- 2004268394 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 4945.".
- 2004268394 issued "2003".
- 2004268394 issued "c2003.".
- 2004268394 language "eng".
- 2004268394 publisher "Bellingham, Wash., USA : SPIE,".
- 2004268394 subject "621.381/045 22".
- 2004268394 subject "Mechatronics Congresses.".
- 2004268394 subject "Microelectromechanical systems Technological innovations Congresses.".
- 2004268394 subject "Microelectronic packaging Technological innovations Congresses.".
- 2004268394 subject "Optical communications Technological innovations Congresses.".
- 2004268394 subject "Optoelectronic devices Design and construction Congresses.".
- 2004268394 subject "TK7875 .M45375 2003".
- 2004268394 title "Advances in photonic communications, sensing, metrology, packaging and assembly".
- 2004268394 title "MEMS, MOEMS".
- 2004268394 title "MEMS/MOEMS : advances in photonic communications, sensing, metrology, packaging and assembly : 28-29 October 2002, Brugge, Belgium / Uwe F. W. Behringer ... [et al.], chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, EOS--European Optical Society ... [et al.].".
- 2004268394 type "text".