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- 2004296380 contributor B9904360.
- 2004296380 contributor B9904361.
- 2004296380 created "c2003.".
- 2004296380 date "2003".
- 2004296380 date "c2003.".
- 2004296380 dateCopyrighted "c2003.".
- 2004296380 description "Includes bibliographical references and index.".
- 2004296380 extent "vii, 186 p. :".
- 2004296380 identifier "0819448486".
- 2004296380 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 5043.".
- 2004296380 isPartOf "SPIE proceedings series, 0277-786X ; v. 5043".
- 2004296380 issued "2003".
- 2004296380 issued "c2003.".
- 2004296380 language "eng".
- 2004296380 publisher "Bellingham, Wash. : SPIE,".
- 2004296380 subject "Integrated circuits Defects Analysis Congresses.".
- 2004296380 subject "Integrated circuits Design and construction Costs Congresses.".
- 2004296380 subject "Microelectronics industry Quality control Congresses.".
- 2004296380 subject "Semiconductor wafers Defects Analysis Congresses.".
- 2004296380 subject "Semiconductors Design and construction Costs Congresses.".
- 2004296380 subject "TK7874 .C72 2003".
- 2004296380 title "Cost and performance in integrated circuit creation : 27-28 February 2003, Santa Clara, California, USA / Alfred K.K. Wong, Kevin M. Monahan, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering.".
- 2004296380 type "text".