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- 2004296385 alternative "Mask technology for integrated circuits and microcomponents".
- 2004296385 contributor B9904369.
- 2004296385 contributor B9904370.
- 2004296385 contributor B9904371.
- 2004296385 created "c2003.".
- 2004296385 date "2003".
- 2004296385 date "c2003.".
- 2004296385 dateCopyrighted "c2003.".
- 2004296385 description "Includes bibliographical references and author index.".
- 2004296385 extent "li, 264 p. :".
- 2004296385 identifier "0819450189".
- 2004296385 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 5148.".
- 2004296385 isPartOf "SPIE proceedings series ; v. 5148".
- 2004296385 issued "2003".
- 2004296385 issued "c2003.".
- 2004296385 language "eng".
- 2004296385 publisher "Bellingham, Wash. : SPIE,".
- 2004296385 subject "621.3815 22".
- 2004296385 subject "Integrated circuits Masks Congresses.".
- 2004296385 subject "Microlithography Congresses.".
- 2004296385 subject "TK7872.M3 E97 2003".
- 2004296385 title "19th European Conference on Mask Technology for Integrated Circuits and Microcomponents : 13-15 January, 2003, Sonthofen, Germany / Uwe F.W. Behringer, chair/editor ; organized by VDE/VDI--Society Microelectronics, Micro- and Precision Engineering (GMM) ... [et al.] ; cooperating oganizations, SEMI Europe ... [et al.] ; published by SPIE--The International Society for Optical Engineering.".
- 2004296385 title "Mask technology for integrated circuits and microcomponents".
- 2004296385 type "text".