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- 2004296392 alternative "Design, process integration, and characterization for microelectronics.".
- 2004296392 contributor B9904386.
- 2004296392 contributor B9904387.
- 2004296392 created "c2003.".
- 2004296392 date "2003".
- 2004296392 date "c2003.".
- 2004296392 dateCopyrighted "c2003.".
- 2004296392 description "Includes bibliographical references and index.".
- 2004296392 extent "x, 222 p. :".
- 2004296392 identifier "081944846X".
- 2004296392 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 5041.".
- 2004296392 isPartOf "SPIE proceedings series, 0277-786X ; v. 5041".
- 2004296392 issued "2003".
- 2004296392 issued "c2003.".
- 2004296392 language "eng".
- 2004296392 publisher "Bellingham, Wash., USA : SPIE,".
- 2004296392 subject "Integrated circuits Defects Analysis Congresses.".
- 2004296392 subject "Integrated circuits Design and construction Congresses.".
- 2004296392 subject "Integrated circuits industry Quality control Congresses.".
- 2004296392 subject "Quality control Congresses.".
- 2004296392 subject "Semiconductor wafers Defects Analysis Congresses.".
- 2004296392 subject "Semiconductors Design and construction Congresses.".
- 2004296392 subject "TK7874 .P754 2003".
- 2004296392 title "Process and materials characterization and diagnostics in IC manufacturing : 27-28 February 2003, Santa Clara, California, USA / Kenneth W. Tobin, Jr., Iraj Emami, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering.".
- 2004296392 type "text".