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- 2004296874 contributor B9905032.
- 2004296874 contributor B9905033.
- 2004296874 created "c2003.".
- 2004296874 date "2003".
- 2004296874 date "c2003.".
- 2004296874 dateCopyrighted "c2003.".
- 2004296874 description "Includes bibliographical references and author index.".
- 2004296874 extent "ix, 604 p. :".
- 2004296874 identifier "081944779X".
- 2004296874 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 4979.".
- 2004296874 isPartOf "SPIE proceedings series ; v. 4979".
- 2004296874 issued "2003".
- 2004296874 issued "c2003.".
- 2004296874 language "eng".
- 2004296874 publisher "Bellingham, Wash. : SPIE,".
- 2004296874 subject "671.3/5 22".
- 2004296874 subject "Electromechanical devices Design and construction Congresses.".
- 2004296874 subject "Microfabrication Congresses.".
- 2004296874 subject "Micromachining Congresses.".
- 2004296874 subject "TJ1191.5 .M5524322 2003".
- 2004296874 title "Micromachining and microfabrication process technology VIII : 27-29 January, 2003, San Jose, California, USA / John A. Yasaitis, Mary Ann Perez-Maher, Jean Michel Karam, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International ... [et al.].".
- 2004296874 type "text".