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- 2004298721 contributor B9907417.
- 2004298721 contributor B9907418.
- 2004298721 created "c2003.".
- 2004298721 date "2003".
- 2004298721 date "c2003.".
- 2004298721 dateCopyrighted "c2003.".
- 2004298721 description "Includes bibliographical references and author index.".
- 2004298721 extent "vii, 208 p. :".
- 2004298721 identifier "0819450561".
- 2004298721 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 5183.".
- 2004298721 isPartOf "SPIE proceedings series ; v. 5183".
- 2004298721 issued "2003".
- 2004298721 issued "c2003.".
- 2004298721 language "eng".
- 2004298721 publisher "Bellingham, Wash. : SPIE,".
- 2004298721 subject "681/.4 22".
- 2004298721 subject "Lenses Design and construction Congresses.".
- 2004298721 subject "Microlithography Congresses.".
- 2004298721 subject "Micromachining Congresses.".
- 2004298721 subject "Optical instruments Design and construction Congresses.".
- 2004298721 subject "TS510 .L57 2003".
- 2004298721 title "Lithographic and micromachining techniques for optical component fabrication II : 3-4 August, 2003, San Diego, California, USA / Ernst-Bernhard Kley, Hans Peter Herzig, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.".
- 2004298721 type "text".