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- 2004301519 contributor B9910800.
- 2004301519 contributor B9910801.
- 2004301519 created "c2004.".
- 2004301519 date "2004".
- 2004301519 date "c2004.".
- 2004301519 dateCopyrighted "c2004.".
- 2004301519 description "Includes bibliographical references and author index.".
- 2004301519 extent "xxxi, 232 p. :".
- 2004301519 identifier "0819452521".
- 2004301519 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 5344.".
- 2004301519 isPartOf "SPIE proceedings series ; v. 5344".
- 2004301519 issued "2004".
- 2004301519 issued "c2004.".
- 2004301519 language "eng".
- 2004301519 publisher "Bellingham, Wash. : SPIE,".
- 2004301519 subject "621.381 22".
- 2004301519 subject "Microelectromechanical systems Congresses.".
- 2004301519 subject "Optoelectronic devices Congresses.".
- 2004301519 subject "TK7875 .M45377 2004".
- 2004301519 title "MEMS/MOEMS components and their applications : 26-27 January, 2004, San Jose, California, USA / Siegfried W. Janson, Albert K. Henning, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.".
- 2004301519 type "text".