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- 2004301598 contributor B9910899.
- 2004301598 contributor B9910900.
- 2004301598 created "c2004.".
- 2004301598 date "2004".
- 2004301598 date "c2004.".
- 2004301598 dateCopyrighted "c2004.".
- 2004301598 description "Includes bibliographical references and author index.".
- 2004301598 extent "xxxi, 312 p. :".
- 2004301598 identifier "0819452513".
- 2004301598 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 5343.".
- 2004301598 isPartOf "SPIE proceedings series ; v. 5343".
- 2004301598 issued "2004".
- 2004301598 issued "c2004.".
- 2004301598 language "eng".
- 2004301598 publisher "Bellingham, Wash. : SPIE,".
- 2004301598 subject "621.381 22".
- 2004301598 subject "Microelectromechanical systems Reliability Congresses.".
- 2004301598 subject "Microelectromechanical systems Testing Congresses.".
- 2004301598 subject "TK7875 .R44 2004".
- 2004301598 title "Reliability, testing, and characterization of MEMS/MOEMS III : 26-28 January, 2004, San Jose, California, USA / Danelle M. Tanner, Rajeshuni Ramesham, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.".
- 2004301598 type "text".