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- 2004303081 alternative "Design and process integration for microelectronic manufacturing III".
- 2004303081 contributor B9912738.
- 2004303081 contributor B9912739.
- 2004303081 created "c2004.".
- 2004303081 date "2004".
- 2004303081 date "c2004.".
- 2004303081 dateCopyrighted "c2004.".
- 2004303081 description "Includes bibliographical references and index.".
- 2004303081 extent "xxviii, 302 p. :".
- 2004303081 identifier "0819452920".
- 2004303081 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 5379.".
- 2004303081 isPartOf "SPIE proceedings series, 0277-786X ; v. 5379".
- 2004303081 issued "2004".
- 2004303081 issued "c2004.".
- 2004303081 language "eng".
- 2004303081 publisher "Bellingham, Wash., USA : SPIE,".
- 2004303081 subject "621.381 22".
- 2004303081 subject "Integrated circuits Defects Analysis Congresses.".
- 2004303081 subject "Integrated circuits Design and construction Congresses.".
- 2004303081 subject "Microelectronics industry Quality control Congresses.".
- 2004303081 subject "Quality control Congresses.".
- 2004303081 subject "Semiconductor wafers Defects Analysis Congresses.".
- 2004303081 subject "Semiconductors Design and construction Congresses.".
- 2004303081 subject "TK7874 .D4746 2004".
- 2004303081 title "Design and process integration for microelectronic manufacturing II [sic] : 26-27 February 2004, Santa Clara, California, USA / Lars W. Liebmann, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International [and] International SEMATECH.".
- 2004303081 title "Design and process integration for microelectronic manufacturing III".
- 2004303081 type "text".