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- 2004303114 contributor B9912782.
- 2004303114 contributor B9912783.
- 2004303114 created "c2004.".
- 2004303114 date "2004".
- 2004303114 date "c2004.".
- 2004303114 dateCopyrighted "c2004.".
- 2004303114 description "Includes bibliographical references and index.".
- 2004303114 extent "xxx, 248 p. :".
- 2004303114 identifier "0819452912".
- 2004303114 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 5378.".
- 2004303114 isPartOf "SPIE proceedings series, 0277-786X ; v. 5378".
- 2004303114 issued "2004".
- 2004303114 issued "c2004.".
- 2004303114 language "eng".
- 2004303114 publisher "Bellingham, Wash., USA : SPIE,".
- 2004303114 subject "660/.2815 22".
- 2004303114 subject "Intelligent control systems Mathematical models Congresses.".
- 2004303114 subject "Manufacturing processes Automatic control Congresses.".
- 2004303114 subject "Manufacturing processes Mathematical models Congresses.".
- 2004303114 subject "Process control Mathematical models Congresses.".
- 2004303114 subject "TS183 .D37 2004".
- 2004303114 title "Data analysis and modeling for process control : 26-27 February 2004, Santa Clara, California, USA / Kenneth W. Tobin, Jr., chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International [and] International SEMATECH.".
- 2004303114 type "text".