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- 2004304500 alternative "Optical microlithography 17".
- 2004304500 alternative "Optical microlithography seventeen".
- 2004304500 contributor B9914478.
- 2004304500 contributor B9914479.
- 2004304500 created "c2004.".
- 2004304500 date "2004".
- 2004304500 date "c2004.".
- 2004304500 dateCopyrighted "c2004.".
- 2004304500 description "Includes bibliographical references and index.".
- 2004304500 extent "3 v. (xxiii, 2008 p.) :".
- 2004304500 identifier "0819452904 (set)".
- 2004304500 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 5377.".
- 2004304500 isPartOf "SPIE proceedings series ; v. 5377".
- 2004304500 issued "2004".
- 2004304500 issued "c2004.".
- 2004304500 language "eng".
- 2004304500 publisher "Bellingham, Wash., USA : SPIE,".
- 2004304500 subject "Integrated circuits Masks Congresses.".
- 2004304500 subject "Manufacturing processes Congresses.".
- 2004304500 subject "Microlithography Congresses.".
- 2004304500 subject "TK7872.M3 O687 2004".
- 2004304500 subject "X-ray lithography Congresses.".
- 2004304500 title "Optical microlithography 17".
- 2004304500 title "Optical microlithography XVII : 24-27 February 2004, Santa Clara, California, USA / Bruce W. Smith, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International [and] International SEMATECH.".
- 2004304500 title "Optical microlithography seventeen".
- 2004304500 type "text".