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- 2004304912 contributor B9914940.
- 2004304912 contributor B9914941.
- 2004304912 created "c2005.".
- 2004304912 date "2005".
- 2004304912 date "c2005.".
- 2004304912 dateCopyrighted "c2005.".
- 2004304912 description "Includes bibliographical references and index.".
- 2004304912 extent "xi, 405 p. :".
- 2004304912 identifier "0387230378 (e-book)".
- 2004304912 identifier "1402080131".
- 2004304912 identifier 2004304912-d.html.
- 2004304912 identifier 2004304912-t.html.
- 2004304912 issued "2005".
- 2004304912 issued "c2005.".
- 2004304912 language "eng".
- 2004304912 publisher "New York : Kluwer Academic,".
- 2004304912 subject "621 22".
- 2004304912 subject "Microelectromechanical systems.".
- 2004304912 subject "TK7875 .L63 2005".
- 2004304912 title "Mechanics of microelectromechanical systems / Nicolae Lobontiu, Ephrahim Garcia.".
- 2004304912 type "text".