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- 2004358512 contributor B9948801.
- 2004358512 contributor B9948802.
- 2004358512 contributor B9948803.
- 2004358512 created "c2003.".
- 2004358512 date "2003".
- 2004358512 date "c2003.".
- 2004358512 dateCopyrighted "c2003.".
- 2004358512 description "Includes bibliographic references.".
- 2004358512 extent "418, [4] p. :".
- 2004358512 hasFormat "Also available on the World Wide Web.".
- 2004358512 identifier "9513862844 (soft back ed.)".
- 2004358512 identifier "9513862852 (URL)".
- 2004358512 identifier S229.pdf.
- 2004358512 isFormatOf "Also available on the World Wide Web.".
- 2004358512 isPartOf "VTT symposium, 0357-9387 ; 229".
- 2004358512 isPartOf "VTT symposium, 1455-0873 (URL:http://www.vtt.fi/inf/pdf) ; 229".
- 2004358512 issued "2003".
- 2004358512 issued "c2003.".
- 2004358512 language "eng".
- 2004358512 publisher "Espoo, Finland : VTT,".
- 2004358512 relation "Also available on the World Wide Web.".
- 2004358512 subject "Clean rooms Congresses.".
- 2004358512 subject "Contamination (Technology) Prevention Congresses.".
- 2004358512 subject "Surface contamination Prevention Congresses.".
- 2004358512 subject "TH7694 .N67 2003".
- 2004358512 title "34th R³-Nordic Contamination Control Symposium : Turku, Finland, June 2-4, 2003 / edited by Gun Wirtanen & Satu Salo ; programme committee, Raimo Pärssinen ... [et al.] ; organized by, R³-Nordic.".
- 2004358512 type "text".