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- 2004464711 contributor B10052792.
- 2004464711 created "2002.".
- 2004464711 date "2002".
- 2004464711 date "2002.".
- 2004464711 dateCopyrighted "2002.".
- 2004464711 description "Includes bibliographical references (p. 81-95).".
- 2004464711 extent "97 p. :".
- 2004464711 identifier "3832202838 (pbk.)".
- 2004464711 identifier 2004464711.html.
- 2004464711 isPartOf "Berichte aus der Mikro- und Feinwerktechnik, 1433-1438 ; Bd. 7".
- 2004464711 issued "2002".
- 2004464711 issued "2002.".
- 2004464711 language "eng".
- 2004464711 publisher "Aachen : Shaker,".
- 2004464711 subject "Clean rooms.".
- 2004464711 subject "Microelectronics Research.".
- 2004464711 subject "TK7874 .A123 2002".
- 2004464711 subject "Technische Universität Braunschweig. Institut für Mikrotechnik.".
- 2004464711 title "10 years of teaching and research, 5 years of clean room operation : report 1991-2001 / S. Büttgenbach (editor).".
- 2004464711 type "text".