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- 2004541255 contributor B10067929.
- 2004541255 contributor B10067930.
- 2004541255 created "c2004.".
- 2004541255 date "2004".
- 2004541255 date "c2004.".
- 2004541255 dateCopyrighted "c2004.".
- 2004541255 description "Includes bibliographical references and index.".
- 2004541255 extent "xv, 260 p. :".
- 2004541255 identifier "0819452548".
- 2004541255 identifier 2004541255.html.
- 2004541255 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 5346.".
- 2004541255 isPartOf "SPIE proceedings series ; v. 5346".
- 2004541255 issued "2004".
- 2004541255 issued "c2004.".
- 2004541255 language "eng".
- 2004541255 publisher "Bellingham, Wash. : SPIE,".
- 2004541255 subject "621.381 22".
- 2004541255 subject "Microelectromechanical systems Congresses.".
- 2004541255 subject "Micromechanics Congresses.".
- 2004541255 subject "Miniature electronic equipment Congresses.".
- 2004541255 subject "Optical scanners Congresses.".
- 2004541255 subject "Optics, Adaptive Congresses.".
- 2004541255 subject "TK7874 .M53255 2004".
- 2004541255 title "MOEMS and miniaturized systems IV : 27-28 January, 2004, San Jose, California, USA / Ayman El-Fatatry, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering.".
- 2004541255 type "text".