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- 2004541282 alternative "Micromachining technology for micro-optics.".
- 2004541282 contributor B10067968.
- 2004541282 contributor B10067969.
- 2004541282 created "c2004.".
- 2004541282 date "2004".
- 2004541282 date "c2004.".
- 2004541282 dateCopyrighted "c2004.".
- 2004541282 description "Includes bibliographical references and author index.".
- 2004541282 extent "xxix, 288 p. :".
- 2004541282 identifier "0819452556".
- 2004541282 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 5347.".
- 2004541282 isPartOf "SPIE proceedings series, 0277-786X ; v. 5347".
- 2004541282 issued "2004".
- 2004541282 issued "c2004.".
- 2004541282 language "eng".
- 2004541282 publisher "Bellingham, Wash., USA : SPIE,".
- 2004541282 subject "621.381 22".
- 2004541282 subject "Integrated optics Congresses.".
- 2004541282 subject "Microelectromechanical systems Congresses.".
- 2004541282 subject "Micromachining Congresses.".
- 2004541282 subject "Miniature electronic equipment Design and construction Congresses.".
- 2004541282 subject "Nanotechnology Congresses.".
- 2004541282 subject "Optoelectronic devices Design and construction Congresses.".
- 2004541282 subject "TA1660 .M537 2004".
- 2004541282 title "Micromachining technology for micro-optics and nano-optics II : 27-29 January 2004, San Jose, California, USA / Eric G. Johnson, Gregory P. Nordin, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering.".
- 2004541282 type "text".