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- 2005023492 contributor B10132198.
- 2005023492 created "c2006.".
- 2005023492 date "2006".
- 2005023492 date "c2006.".
- 2005023492 dateCopyrighted "c2006.".
- 2005023492 description "Includes bibliographical references and index.".
- 2005023492 extent "xxv, 965 p. :".
- 2005023492 identifier "0815514972 (William Andrew : alk. paper)".
- 2005023492 identifier "3540211179 (Springer-Verlag)".
- 2005023492 identifier 2005023492-d.html.
- 2005023492 identifier 2005023492.html.
- 2005023492 issued "2006".
- 2005023492 issued "c2006.".
- 2005023492 language "eng".
- 2005023492 publisher "Norwich, NY : W. Andrew Pub. ; Heidelberg, Germany : Springer,".
- 2005023492 subject "621 22".
- 2005023492 subject "Microelectromechanical systems.".
- 2005023492 subject "TK7875 .M42 2006".
- 2005023492 title "MEMS : a practical guide to design, analysis, and applications / edited by Jan G. Korvink and Oliver Paul.".
- 2005023492 type "text".