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- 2005024414 contributor B10133297.
- 2005024414 created "2006.".
- 2005024414 date "2006".
- 2005024414 date "2006.".
- 2005024414 dateCopyrighted "2006.".
- 2005024414 description "Includes bibliographical references and index.".
- 2005024414 extent "386 p. :".
- 2005024414 identifier "0849335434 (alk. paper)".
- 2005024414 identifier 2005024414-d.html.
- 2005024414 identifier 2005024414.html.
- 2005024414 issued "2006".
- 2005024414 issued "2006.".
- 2005024414 language "eng".
- 2005024414 publisher "Boca Raton, FL : CRC/Taylor & Francis,".
- 2005024414 subject "621.3815/2 22".
- 2005024414 subject "Integrated circuits Design and construction.".
- 2005024414 subject "Semiconductors Cleaning.".
- 2005024414 subject "Semiconductors Design and construction.".
- 2005024414 subject "TK7871.85 .S3965 2006".
- 2005024414 title "Scientific wet process technology for innovative LSI/FPD manufacturing / edited by Tadahiro Ohmi.".
- 2005024414 type "text".