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- 2005028448 contributor B10138319.
- 2005028448 contributor B10138320.
- 2005028448 created "c2006.".
- 2005028448 date "2006".
- 2005028448 date "c2006.".
- 2005028448 dateCopyrighted "c2006.".
- 2005028448 description "Includes bibliographical references and index.".
- 2005028448 extent "xix, 463 p. :".
- 2005028448 identifier "0471784060 (cloth : alk. paper)".
- 2005028448 identifier "9780471784067".
- 2005028448 identifier 2005028448-d.html.
- 2005028448 identifier 2005028448-b.html.
- 2005028448 identifier 2005028448.html.
- 2005028448 issued "2006".
- 2005028448 issued "c2006.".
- 2005028448 language "eng".
- 2005028448 publisher "[Piscataway] : IEEE ; Hoboken, N.J. : Wiley-Interscience,".
- 2005028448 subject "621.3815/2 22".
- 2005028448 subject "Integrated circuits Design and construction.".
- 2005028448 subject "Process control Statistical methods.".
- 2005028448 subject "Semiconductors Design and construction.".
- 2005028448 subject "TK7871.85 .M379 2006".
- 2005028448 title "Fundamentals of semiconductor manufacturing and process control / Gary S. May, Costas J. Spanos.".
- 2005028448 type "text".