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- 2005034584 contributor B10145714.
- 2005034584 created "2006.".
- 2005034584 date "2006".
- 2005034584 date "2006.".
- 2005034584 dateCopyrighted "2006.".
- 2005034584 description "Includes bibliographical references and index.".
- 2005034584 extent "xii, 122 p. :".
- 2005034584 identifier "0819462071".
- 2005034584 identifier 2005034584.html.
- 2005034584 isPartOf "SPIE field guides ; FG06".
- 2005034584 issued "2006".
- 2005034584 issued "2006.".
- 2005034584 language "eng".
- 2005034584 publisher "Bellingham, Wash. : SPIE Press,".
- 2005034584 subject "621.3815/31 22".
- 2005034584 subject "Integrated circuits Design and construction.".
- 2005034584 subject "Microlithography.".
- 2005034584 subject "TK7874 .M195 2006".
- 2005034584 title "Field guide to optical lithography / Chris A. Mack.".
- 2005034584 type "text".