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- 2005042537 contributor B10152698.
- 2005042537 created "2005.".
- 2005042537 date "2005".
- 2005042537 date "2005.".
- 2005042537 dateCopyrighted "2005.".
- 2005042537 description "Includes bibliographical references (p. 219-229) and index.".
- 2005042537 extent "xix, 254 p. :".
- 2005042537 identifier "0819458295 (softcover)".
- 2005042537 issued "2005".
- 2005042537 issued "2005.".
- 2005042537 language "eng".
- 2005042537 publisher "Bellingham, WA : SPIE Optical Engineering Press,".
- 2005042537 subject "621.3815/31 22".
- 2005042537 subject "Imaging systems.".
- 2005042537 subject "Microlithography.".
- 2005042537 subject "TK7836 .W66 2005".
- 2005042537 title "Optical imaging in projection microlithography / Alfred Kwok-Kit Wong.".
- 2005042537 type "text".