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- 2005042621 alternative "MEMS/NEMS handbook".
- 2005042621 contributor B10152795.
- 2005042621 created "c2006.".
- 2005042621 date "2006".
- 2005042621 date "c2006.".
- 2005042621 dateCopyrighted "c2006.".
- 2005042621 description "Includes bibliographical references and index.".
- 2005042621 description "v. 1. Design methods -- v. 2. Fabrication techniques -- v. 3. Manufacturing methods -- v. 4. Sensors and actuators -- v. 5. Medical applications and MOEMS.".
- 2005042621 extent "5 v. :".
- 2005042621 identifier "0387245200".
- 2005042621 identifier "9780387245201".
- 2005042621 identifier 2005042621-d.html.
- 2005042621 identifier 2005042621-t.html.
- 2005042621 issued "2006".
- 2005042621 issued "c2006.".
- 2005042621 language "eng".
- 2005042621 publisher "New York : Springer,".
- 2005042621 subject "620/.5 22".
- 2005042621 subject "Microelectromechanical systems Design and construction.".
- 2005042621 subject "Nanotechnology.".
- 2005042621 subject "TK153 .M446 2006".
- 2005042621 tableOfContents "v. 1. Design methods -- v. 2. Fabrication techniques -- v. 3. Manufacturing methods -- v. 4. Sensors and actuators -- v. 5. Medical applications and MOEMS.".
- 2005042621 title "MEMS/NEMS : handbook techniques and applications / edited by Cornelius T. Leondes.".
- 2005042621 title "MEMS/NEMS handbook".
- 2005042621 type "text".