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- 2005046670 contributor B10157396.
- 2005046670 created "c2007.".
- 2005046670 date "2007".
- 2005046670 date "c2007.".
- 2005046670 dateCopyrighted "c2007.".
- 2005046670 description "Includes bibliographical references and index.".
- 2005046670 extent "503 p., [8] p. of plates :".
- 2005046670 identifier "0849336821 (alk. paper)".
- 2005046670 identifier "9780849336829".
- 2005046670 identifier 2005046670-d.html.
- 2005046670 isPartOf "Optical science and engineering (Boca Raton, Fla.) ; 109.".
- 2005046670 isPartOf "Optical science and engineering ; 109".
- 2005046670 issued "2007".
- 2005046670 issued "c2007.".
- 2005046670 language "eng".
- 2005046670 publisher "Boca Raton, FL : CRC/Taylor & Francis,".
- 2005046670 subject "670.42/5 22".
- 2005046670 subject "Microelectronics.".
- 2005046670 subject "Optical detectors Industrial applications.".
- 2005046670 subject "Quality control Optical methods.".
- 2005046670 subject "TS156.2 .O652 2007".
- 2005046670 title "Optical inspection of microsystems / edited by Wolfgang Osten.".
- 2005046670 type "text".