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- 2005048932 contributor B10159927.
- 2005048932 created "c2006.".
- 2005048932 date "2006".
- 2005048932 date "c2006.".
- 2005048932 dateCopyrighted "c2006.".
- 2005048932 description "Includes bibliographical references and index.".
- 2005048932 extent "xxii, 530 p. :".
- 2005048932 identifier "0131472860".
- 2005048932 issued "2006".
- 2005048932 issued "c2006.".
- 2005048932 language "eng".
- 2005048932 publisher "Upper Saddle River, NJ : Pearson/Prentice Hall,".
- 2005048932 subject "621.3 22".
- 2005048932 subject "Microelectromechanical systems.".
- 2005048932 subject "TK7875 .L48 2006".
- 2005048932 title "Foundations of MEMS / Chang Liu.".
- 2005048932 type "text".