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- 2005049275 contributor B10160319.
- 2005049275 created "2006.".
- 2005049275 date "2006".
- 2005049275 date "2006.".
- 2005049275 dateCopyrighted "2006.".
- 2005049275 description "Includes bibliographical references and index.".
- 2005049275 extent "401 p. :".
- 2005049275 identifier "0824724313 (Hardcover)".
- 2005049275 identifier "9780824724313".
- 2005049275 identifier 2005049275-d.html.
- 2005049275 identifier 2005049275.html.
- 2005049275 issued "2006".
- 2005049275 issued "2006.".
- 2005049275 language "eng".
- 2005049275 publisher "Boca Raton, FL : CRC/Taylor & Francis,".
- 2005049275 subject "620/.5 22".
- 2005049275 subject "Integrated circuits Design and construction.".
- 2005049275 subject "Microelectromechanical systems Design and construction.".
- 2005049275 subject "Microelectronics.".
- 2005049275 subject "Nanomanufacturing.".
- 2005049275 subject "TK7836 .M523 2006".
- 2005049275 title "Microfabrication and nanomanufacturing / edited by Mark J. Jackson.".
- 2005049275 type "text".