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- 2005050109 contributor B10161331.
- 2005050109 created "2006.".
- 2005050109 date "2006".
- 2005050109 date "2006.".
- 2005050109 dateCopyrighted "2006.".
- 2005050109 description "Includes bibliographical references and index.".
- 2005050109 extent "1 v. (various pagings) :".
- 2005050109 identifier "0849321069 (set : alk. paper)".
- 2005050109 identifier "0849391385 (alk. paper)".
- 2005050109 identifier 2005050109-d.html.
- 2005050109 identifier 2005050109.html.
- 2005050109 isPartOf "Mechanical engineering series (Boca Raton, Fla.)".
- 2005050109 isPartOf "Mechanical engineering series".
- 2005050109 isPartOf "The MEMS handbook".
- 2005050109 issued "2006".
- 2005050109 issued "2006.".
- 2005050109 language "eng".
- 2005050109 publisher "Boca Raton, FL : CRC/Taylor & Francis,".
- 2005050109 subject "621.381 22".
- 2005050109 subject "Microelectromechanical systems Design and construction.".
- 2005050109 subject "Microfabrication.".
- 2005050109 subject "TK7875 .M444 2005".
- 2005050109 title "MEMS : design and fabrication / edited by Mohamed Gad-el-Hak.".
- 2005050109 type "text".