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- 2005050111 contributor B10161333.
- 2005050111 created "2006.".
- 2005050111 date "2006".
- 2005050111 date "2006.".
- 2005050111 dateCopyrighted "2006.".
- 2005050111 description "Includes bibliographical references and index.".
- 2005050111 extent "1 v. (various pagings) :".
- 2005050111 identifier "0849321069 (set : alk. paper)".
- 2005050111 identifier "0849391377 (alk. paper)".
- 2005050111 identifier 2005050111-d.html.
- 2005050111 isPartOf "Mechanical engineering series (Boca Raton, Fla.)".
- 2005050111 isPartOf "Mechanical engineering series".
- 2005050111 isPartOf "The MEMS handbook".
- 2005050111 issued "2006".
- 2005050111 issued "2006.".
- 2005050111 language "eng".
- 2005050111 publisher "Boca Raton : CRC/Taylor & Francis,".
- 2005050111 subject "621.381 22".
- 2005050111 subject "Microelectromechanical systems.".
- 2005050111 subject "Microelectronics.".
- 2005050111 subject "Nanotechnology.".
- 2005050111 subject "TK7875 .M43 2006".
- 2005050111 title "MEMS : introduction and fundamentals / edited by Mohamed Gad-El-Hak.".
- 2005050111 type "text".