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- 2005052196 contributor B10163836.
- 2005052196 contributor B10163837.
- 2005052196 created "2006.".
- 2005052196 date "2006".
- 2005052196 date "2006.".
- 2005052196 dateCopyrighted "2006.".
- 2005052196 description "Includes bibliographical references and index.".
- 2005052196 extent "279 p. :".
- 2005052196 identifier "0849339286 (alk. paper)".
- 2005052196 identifier 2005052196-d.html.
- 2005052196 issued "2006".
- 2005052196 issued "2006.".
- 2005052196 language "eng".
- 2005052196 publisher "Boca Raton : CRC/Taylor & Francis,".
- 2005052196 subject "621.3815/2 22".
- 2005052196 subject "Fluroscopy.".
- 2005052196 subject "Integrated circuits Measurement.".
- 2005052196 subject "Semiconductor wafers Inspection.".
- 2005052196 subject "Semiconductors Design and construction Quality control.".
- 2005052196 subject "TK7874.58 .B69 2006".
- 2005052196 subject "X-rays Diffraction.".
- 2005052196 title "X-ray metrology in semiconductor manufacturing / D. Keith Bowen, Brian K. Tanner.".
- 2005052196 type "text".