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- 2005056888 contributor B10168572.
- 2005056888 contributor B10168573.
- 2005056888 created "2006.".
- 2005056888 date "2006".
- 2005056888 date "2006.".
- 2005056888 dateCopyrighted "2006.".
- 2005056888 description "Includes bibliographical references and index.".
- 2005056888 extent "339 p. :".
- 2005056888 identifier "0750309768".
- 2005056888 identifier "9780750309769".
- 2005056888 identifier 2005056888-d.html.
- 2005056888 isPartOf "Series in plasma physics".
- 2005056888 issued "2006".
- 2005056888 issued "2006.".
- 2005056888 language "eng".
- 2005056888 publisher "New York : Taylor & Francis,".
- 2005056888 subject "621.044 22".
- 2005056888 subject "Plasma engineering.".
- 2005056888 subject "TA2020 .M35 2006".
- 2005056888 title "Plasma electronics : applications in microelectronic device fabrication / T. Makabe, Z. Petrović.".
- 2005056888 type "text".