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- 2005276622 alternative "MEMS--2003".
- 2005276622 contributor B10178513.
- 2005276622 contributor B10178514.
- 2005276622 contributor B10178515.
- 2005276622 created "c2003.".
- 2005276622 date "2003".
- 2005276622 date "c2003.".
- 2005276622 dateCopyrighted "c2003.".
- 2005276622 description "Includes bibliographical references and author index.".
- 2005276622 extent "xvi, 737 p. :".
- 2005276622 identifier "0791837211".
- 2005276622 isPartOf "MEMS (Series) (American Society of Mechanical Engineers) ; v. 5.".
- 2005276622 isPartOf "MEMS ; vol. 5".
- 2005276622 issued "2003".
- 2005276622 issued "c2003.".
- 2005276622 language "eng".
- 2005276622 publisher "New York, N.Y. : American Society of Mechanical Engineers,".
- 2005276622 subject "621.381 22".
- 2005276622 subject "Fluidic devices Congresses.".
- 2005276622 subject "Microelectromechanical systems Congresses.".
- 2005276622 subject "TK7875 .M5324 2003".
- 2005276622 title "MEMS--2003".
- 2005276622 title "Micro-electro-mechanical systems (MEMS)--2003 : presented at the 2003 ASME International Mechanical Engineering Congress : November 15-21, 2003, Washington, D.C. / co-sponsored by the MEMS Subdivision, ASME ... [et al.] ; organized by Kimberly Turner ... [et al.].".
- 2005276622 type "text".