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- 2005279754 contributor B10182246.
- 2005279754 contributor B10182247.
- 2005279754 created "c2005.".
- 2005279754 date "2005".
- 2005279754 date "c2005.".
- 2005279754 dateCopyrighted "c2005.".
- 2005279754 description "Includes bibliographical references and author index.".
- 2005279754 extent "xli, 242 p. :".
- 2005279754 identifier "0819456918".
- 2005279754 isPartOf "Proceedings of SPIE, 0277-786X ; v. 5717".
- 2005279754 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 5717.".
- 2005279754 issued "2005".
- 2005279754 issued "c2005.".
- 2005279754 language "eng".
- 2005279754 publisher "Bellingham, Wash. : SPIE,".
- 2005279754 subject "621.381 22".
- 2005279754 subject "Microelectromechanical systems Congresses.".
- 2005279754 subject "Optoelectronic devices Congresses.".
- 2005279754 subject "TK7875 .M45377 2005".
- 2005279754 title "MEMS/MOEMS components and their applications II : 24-25 January 2005, San Jose, California, USA / Albert K. Henning, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology [and] Sandia National Laboratories (USA).".
- 2005279754 type "text".