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- 2005284352 contributor B10187790.
- 2005284352 contributor B10187791.
- 2005284352 created "c2005.".
- 2005284352 date "2005".
- 2005284352 date "c2005.".
- 2005284352 dateCopyrighted "c2005.".
- 2005284352 description "Includes bibliographical references and author index.".
- 2005284352 extent "1 v. (various pagings) :".
- 2005284352 identifier "0819458589 (pbk.)".
- 2005284352 identifier 2005284352.html.
- 2005284352 isPartOf "Proceedings of SPIE ; v. 5858".
- 2005284352 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 5858.".
- 2005284352 issued "2005".
- 2005284352 issued "c2005.".
- 2005284352 language "eng".
- 2005284352 publisher "Bellingham, Wash. : SPIE,".
- 2005284352 subject "681/.25 22".
- 2005284352 subject "Optical measurements Congresses.".
- 2005284352 subject "QC367 .N36 2005".
- 2005284352 title "Nano- and micro-metrology : 16-17 June 2005, Munich, Germany / Heidi Ottevaere, Peter DeWolf, Diederik S. Wiersma; sponsored by SPIE Europe ; cooperating organizations, EOS--European Optical Society ... [et al.] ; published by SPIE--the International Society for Optical Engineering.".
- 2005284352 type "text".