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- 2005284398 contributor B10187869.
- 2005284398 contributor B10187870.
- 2005284398 created "c2005.".
- 2005284398 date "2005".
- 2005284398 date "c2005.".
- 2005284398 dateCopyrighted "c2005.".
- 2005284398 description "Includes bibliographical references and author index.".
- 2005284398 extent "1 v. (various pagings) :".
- 2005284398 identifier "0819459267 (pbk.)".
- 2005284398 isPartOf "Proceedings of SPIE, 0277-786X ; v. 5921".
- 2005284398 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 5921.".
- 2005284398 issued "2005".
- 2005284398 issued "c2005.".
- 2005284398 language "eng".
- 2005284398 publisher "Bellingham, Wash. : SPIE,".
- 2005284398 subject "681/.25 22".
- 2005284398 subject "Laser interferometers Congresses.".
- 2005284398 subject "Measurement Congresses.".
- 2005284398 subject "Measuring instruments Design and construction Congresses.".
- 2005284398 subject "Optical instruments Design and construction Congresses.".
- 2005284398 subject "Optical measurements Congresses.".
- 2005284398 subject "QC367 .A338 2005".
- 2005284398 title "Advances in metrology for x-ray and EUV optics : 2-3 August, 2005, San Diego, California, USA / Lahsen Assoufid, Peter Z. Takacs, John S. Taylor, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.".
- 2005284398 type "text".