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- 2005284657 contributor B10188163.
- 2005284657 contributor B10188164.
- 2005284657 contributor B10188165.
- 2005284657 created "c2005.".
- 2005284657 date "2005".
- 2005284657 date "c2005.".
- 2005284657 dateCopyrighted "c2005.".
- 2005284657 description "Includes bibliographical references and indexes.".
- 2005284657 extent "ix, 171 p. :".
- 2005284657 identifier "1558998233".
- 2005284657 identifier 2005284657-d.html.
- 2005284657 isPartOf "Materials Research Society symposia proceedings ; v. 869".
- 2005284657 isPartOf "Materials Research Society symposium proceedings ; v. 869".
- 2005284657 issued "2005".
- 2005284657 issued "c2005.".
- 2005284657 language "eng".
- 2005284657 publisher "Warrendale, Pa. : Materials Research Society,".
- 2005284657 subject "621.3815/2 22".
- 2005284657 subject "Integrated circuits Ultra large scale integration Design and construction Congresses.".
- 2005284657 subject "Integrated circuits Ultra large scale integration Materials Congresses.".
- 2005284657 subject "Metallic films Congresses.".
- 2005284657 subject "Metallizing Congresses.".
- 2005284657 subject "Semiconductors Design and construction Congresses.".
- 2005284657 subject "TK7871.85 .M367815 2005".
- 2005284657 subject "Thin films Congresses.".
- 2005284657 title "Materials, integration and technology for monolithic instruments : symposium held March 29-30, 2005, San Francisco, California, USA / editors: Jeremy A. Theil ... [et al.].".
- 2005284657 type "text".