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- 2005285362 contributor B10188401.
- 2005285362 contributor B10188402.
- 2005285362 contributor B10188403.
- 2005285362 created "c2005.".
- 2005285362 date "2005".
- 2005285362 date "c2005.".
- 2005285362 dateCopyrighted "c2005.".
- 2005285362 description "Includes bibliographical references and indexes.".
- 2005285362 extent "xi, 302 p. :".
- 2005285362 identifier "1558998209".
- 2005285362 identifier 2005285362-d.html.
- 2005285362 isPartOf "Materials Research Society symposia proceedings ; v. 867.".
- 2005285362 isPartOf "Materials Research Society symposium proceedings ; 867".
- 2005285362 issued "2005".
- 2005285362 issued "c2005.".
- 2005285362 language "eng".
- 2005285362 publisher "Warrendale, Pa. : Materials Research Society,".
- 2005285362 subject "621.381 22".
- 2005285362 subject "Chemical mechanical planarization Congresses.".
- 2005285362 subject "Grinding and polishing Congresses.".
- 2005285362 subject "Metals Pickling Congresses.".
- 2005285362 subject "Microelectronics Materials Congresses.".
- 2005285362 subject "Semiconductors Surfaces Congresses.".
- 2005285362 subject "TK7871 .C465 2005".
- 2005285362 title "Chemical-mechanical planarization--integration, technology and reliability : symposium held March 28-31, 2005, San Francisco, California, U.S.A. / editors, Ashok Kumar ... [et al.].".
- 2005285362 type "text".