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- 2005296016 alternative "Micromachining technology for micro-optics.".
- 2005296016 contributor B10189695.
- 2005296016 contributor B10189696.
- 2005296016 created "c2005.".
- 2005296016 date "2005".
- 2005296016 date "c2005.".
- 2005296016 dateCopyrighted "c2005.".
- 2005296016 description "Includes bibliographical references and author index.".
- 2005296016 extent "xl, 282 p. :".
- 2005296016 identifier "0819456942".
- 2005296016 isPartOf "Proceedings of SPIE, 0277-786X ; v. 5720".
- 2005296016 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 5720.".
- 2005296016 issued "2005".
- 2005296016 issued "c2005.".
- 2005296016 language "eng".
- 2005296016 publisher "Bellingham, Wash. : SPIE,".
- 2005296016 subject "621.381 22".
- 2005296016 subject "Integrated optics Congresses.".
- 2005296016 subject "Microelectromechanical systems Congresses.".
- 2005296016 subject "Micromachining Congresses.".
- 2005296016 subject "Miniature electronic equipment Design and construction Congresses.".
- 2005296016 subject "Optoelectronic devices Design and construction Congresses.".
- 2005296016 subject "TA1660 .M5372 2005".
- 2005296016 subject "Victoria and Albert Museum.".
- 2005296016 title "Micromachining technology for micro-optics and nano-optics III : 25-27 January 2005, San Jose, California, USA / Eric G. Johnson, Gregory P. Nordin, Thomas J. Suleski, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology, Sandia National Laboratories (USA).".
- 2005296016 type "text".