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- 2005296018 contributor B10189699.
- 2005296018 contributor B10189700.
- 2005296018 created "c2005.".
- 2005296018 date "2005".
- 2005296018 date "c2005.".
- 2005296018 dateCopyrighted "c2005.".
- 2005296018 description "Includes bibliographical references and author index.".
- 2005296018 extent "xli, 214 p. :".
- 2005296018 identifier "0819456950".
- 2005296018 isPartOf "Proceedings of SPIE, 0277-786X ; v. 5721".
- 2005296018 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 5721.".
- 2005296018 issued "2005".
- 2005296018 issued "c2005.".
- 2005296018 language "eng".
- 2005296018 publisher "Bellingham, Wash., USA : SPIE,".
- 2005296018 subject "621.36/7 22".
- 2005296018 subject "Imaging systems Design and construction Congresses.".
- 2005296018 subject "Microelectromechanical systems Congresses.".
- 2005296018 subject "Optics, Adaptive Congresses.".
- 2005296018 subject "Scanning systems Design and construction Congresses.".
- 2005296018 subject "TK7875 .M63 2005".
- 2005296018 title "MOEMS display and imaging systems III : 24-25 January 2005, San Jose, California, USA / Hakan Urey, David L. Dickensheets, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology, Sandia National Laboratories (USA).".
- 2005296018 type "text".