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- 2005298639 contributor B10192693.
- 2005298639 contributor B10192694.
- 2005298639 created "c2004.".
- 2005298639 date "2004".
- 2005298639 date "c2004.".
- 2005298639 dateCopyrighted "c2004.".
- 2005298639 extent "xi, 438 p. :".
- 2005298639 identifier "0819453781".
- 2005298639 isPartOf "Proceedings of SPIE, 0277-786X ; v. 5455".
- 2005298639 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 5455.".
- 2005298639 issued "2004".
- 2005298639 issued "c2004.".
- 2005298639 language "eng".
- 2005298639 publisher "Bellingham, Wash., USA : SPIE,".
- 2005298639 subject "621 22".
- 2005298639 subject "Microelectromechanical systems Congresses.".
- 2005298639 subject "Micromachining Congresses.".
- 2005298639 subject "Optoelectronic devices Congresses.".
- 2005298639 subject "TK7875 .M45376 2004".
- 2005298639 title "MEMS, MOEMS, and micromachining : 29-30 April, 2004, Strasbourg, France / Hakan Ürey, Ayman El-Fatatry, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.".
- 2005298639 type "text".