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- 2005298734 alternative "MOEMS and miniaturized systems 5".
- 2005298734 alternative "MOEMS and miniaturized systems five".
- 2005298734 contributor B10192851.
- 2005298734 contributor B10192852.
- 2005298734 created "c2005.".
- 2005298734 date "2005".
- 2005298734 date "c2005.".
- 2005298734 dateCopyrighted "c2005.".
- 2005298734 description "Includes bibliographical references and author index.".
- 2005298734 extent "xl, 190 p. :".
- 2005298734 identifier "0819456934".
- 2005298734 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 5719.".
- 2005298734 isPartOf "SPIE proceedings series, 0277-786X ; v. 5719".
- 2005298734 issued "2005".
- 2005298734 issued "c2005.".
- 2005298734 language "eng".
- 2005298734 publisher "Bellingham, Wash. : SPIE,".
- 2005298734 subject "621.36/7 22".
- 2005298734 subject "Microelectromechanical systems Congresses.".
- 2005298734 subject "Micromechanics Congresses.".
- 2005298734 subject "Miniature electronic equipment Congresses.".
- 2005298734 subject "Optical scanners Congresses.".
- 2005298734 subject "Optics, Adaptive Congresses.".
- 2005298734 subject "TK7874 .M53255 2005".
- 2005298734 title "MOEMS and miniaturized systems 5".
- 2005298734 title "MOEMS and miniaturized systems V : 25-26 January 2005, San Jose, California, USA / Ayman El-Fatatry, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology [and] Sandia National Laboratories (USA).".
- 2005298734 title "MOEMS and miniaturized systems five".
- 2005298734 type "text".