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- 2005298837 alternative "European Conference on Mask Technology for Integrated Circuits and Microcomponents".
- 2005298837 alternative "Mask technology for integrated circuits and microcomponents".
- 2005298837 alternative "Twentieth European Conference on Mask Technology for Integrated Circuits and Microcomponents".
- 2005298837 contributor B10192993.
- 2005298837 contributor B10192994.
- 2005298837 contributor B10192995.
- 2005298837 created "c2004.".
- 2005298837 date "2004".
- 2005298837 date "c2004.".
- 2005298837 dateCopyrighted "c2004.".
- 2005298837 description "Includes bibliographical references and index.".
- 2005298837 extent "xxiv, 210 p. :".
- 2005298837 identifier "0819454370".
- 2005298837 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 5504.".
- 2005298837 isPartOf "SPIE proceedings series, 0277-786X ; v. 5504".
- 2005298837 issued "2004".
- 2005298837 issued "c2004.".
- 2005298837 language "eng".
- 2005298837 publisher "Bellingham, Wash., USA : SPIE,".
- 2005298837 subject "621.3815 22".
- 2005298837 subject "Integrated circuits Masks Congresses.".
- 2005298837 subject "Microlithography Congresses.".
- 2005298837 subject "TK7872.M3 E97 2004".
- 2005298837 title "20th European Conference on Mask Technology for Integrated Circuits and Microcomponents : 12-14 January 2004, Dresden, Germany / Uwe F.W. Behringer, chair/editor ; organized by VDE/VDI-Society Microelectronics, Micro- and Precision Engineering (GMM) (Germany) [and] Institute for Microstructure Technology/Forschungszentrum Karlsruhe (Germany) ; cooperating organizations, SEMI Europe ... [et al.].".
- 2005298837 title "European Conference on Mask Technology for Integrated Circuits and Microcomponents".
- 2005298837 title "Mask technology for integrated circuits and microcomponents".
- 2005298837 title "Twentieth European Conference on Mask Technology for Integrated Circuits and Microcomponents".
- 2005298837 type "text".