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- 2005299091 alternative "Micro Electro Mechanical Systems, 2005, MEMS 2005, 18th IEEE International Conference on.".
- 2005299091 alternative "Micro electro mechanical systems".
- 2005299091 contributor B10193327.
- 2005299091 contributor B10193328.
- 2005299091 created "c2005.".
- 2005299091 date "2005".
- 2005299091 date "c2005.".
- 2005299091 dateCopyrighted "c2005.".
- 2005299091 description "Includes bibliographical references and indexes.".
- 2005299091 extent "xxxvii, 886, 15 p. :".
- 2005299091 hasFormat "Also issued online with additional title: Micro Electro Mechanical Systems, 2005, MEMS 2005, 18th IEEE International Conference on.".
- 2005299091 identifier "0780387325".
- 2005299091 identifier opac?punumber=9868.
- 2005299091 isFormatOf "Also issued online with additional title: Micro Electro Mechanical Systems, 2005, MEMS 2005, 18th IEEE International Conference on.".
- 2005299091 issued "2005".
- 2005299091 issued "c2005.".
- 2005299091 language "eng".
- 2005299091 publisher "Piscataway, N.J. : IEEE,".
- 2005299091 relation "Also issued online with additional title: Micro Electro Mechanical Systems, 2005, MEMS 2005, 18th IEEE International Conference on.".
- 2005299091 subject "621.381 22".
- 2005299091 subject "Microelectromechanical systems Congresses.".
- 2005299091 subject "TK7875 .I33 2005".
- 2005299091 title "MEMS 2005 Miami : 18th IEEE International Conference on Micro Electro Mechanical Systems : technical digest : Miami Beach, Florida, USA, January 30-February 3, 2005 / sponsored by IEEE and the Robotics and Automation Society.".
- 2005299091 title "Micro electro mechanical systems".
- 2005299091 type "text".