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- 2005299098 contributor B10193340.
- 2005299098 contributor B10193341.
- 2005299098 created "c2005.".
- 2005299098 date "2005".
- 2005299098 date "c2005.".
- 2005299098 dateCopyrighted "c2005.".
- 2005299098 description "Includes bibliographical references and author index.".
- 2005299098 extent "vii, 200 p. :".
- 2005299098 identifier "0819456896".
- 2005299098 isPartOf "Proceedings of SPIE, 0277-786X ; v. 5715".
- 2005299098 isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 5715.".
- 2005299098 issued "2005".
- 2005299098 issued "c2005.".
- 2005299098 language "eng".
- 2005299098 publisher "Bellingham, Wash. : SPIE,".
- 2005299098 subject "671.3/5 22".
- 2005299098 subject "Electromechanical devices Design and construction Congresses.".
- 2005299098 subject "Microfabrication Congresses.".
- 2005299098 subject "Micromachining Congresses.".
- 2005299098 subject "TJ1191.5 .M55243232 2005".
- 2005299098 title "Micromachining and microfabrication process technology X : 25-27 January 2005, San Jose, California, USA / Mary Ann Maher, Harold D. Stewart, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology, Sandia National Laboratories.".
- 2005299098 type "text".