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- 2005353028 alternative "Microprocesses and nanotechnology '99".
- 2005353028 contributor B10226177.
- 2005353028 contributor B10226178.
- 2005353028 created "c1999.".
- 2005353028 date "1999".
- 2005353028 date "c1999.".
- 2005353028 dateCopyrighted "c1999.".
- 2005353028 description "Includes bibliographical references and index.".
- 2005353028 extent "xxii, 234 p. :".
- 2005353028 identifier "4930813972 (pbk.)".
- 2005353028 issued "1999".
- 2005353028 issued "c1999.".
- 2005353028 language "eng".
- 2005353028 publisher "Tokyo, Japan : Business Center for Academic Societies Japan,".
- 2005353028 subject "621.3815/31 22".
- 2005353028 subject "Microelectronics Congresses.".
- 2005353028 subject "Microfabrication Congresses.".
- 2005353028 subject "Microlithography Congresses.".
- 2005353028 subject "Nanotechnology Congresses.".
- 2005353028 subject "TK7874 .I47353 1999".
- 2005353028 title "Digest of papers : microprocesses and nanotechnology '99 : 1999 International Microprocesses and Nanotechnology Conference : July 6-8, 1999, Yokohama, Japan / sponsored by the Japan Society of Applied Physics ; technical-cosponsored, IEEE Electron Device Society ; cooperation, American Vacuum Society ... [et al.].".
- 2005353028 title "Microprocesses and nanotechnology '99".
- 2005353028 type "text".