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- 2005353607 contributor B10226821.
- 2005353607 created "2003.".
- 2005353607 date "2003".
- 2005353607 date "2003.".
- 2005353607 dateCopyrighted "2003.".
- 2005353607 description "Includes bibliographical references and indexes.".
- 2005353607 extent "6, 338, 2, 10 p. :".
- 2005353607 identifier "4860430395".
- 2005353607 issued "2003".
- 2005353607 issued "2003.".
- 2005353607 language "jpn".
- 2005353607 publisher "Tōkyō : Enu Tī Esu,".
- 2005353607 subject "TJ940 .Y67 2003".
- 2005353607 subject "Vacuum metallurgy.".
- 2005353607 subject "Vacuum microelectronics.".
- 2005353607 subject "Vacuum technology.".
- 2005353607 title "880-02 Maikuro nano denshi bīmu sōchi ni okeru shinkū gijutsu / chosha Yoshimura Nagamitsu.".
- 2005353607 type "text".